Interim websiteOur new website is currently being built. Until it goes live, this page provides the key information – all contact channels remain available as usual.

NanoFocus GmbH · A Mahr Group Company

Where nanometers matter – optical 3D metrology for semiconductor manufacturing

NanoFocus develops and manufactures non-contact 3D surface metrology in Oberhausen, Germany – from lab microscopes to automated wafer metrology in the cleanroom. The Mahr Group's specialist for semiconductor metrology.

1994founded in Oberhausen
nmvertical resolution
Sample · 12″ · Panelfrom small samples to 12-inch wafers and panels
Lab → Fabone metrology, every stage

Semiconductor · Electronics · Microelectronics

Metrology along the semiconductor process chain

We measure the topography that decides function and yield – from wafer to test to package.

Wafer process & surface

CMP, dishing & erosion, grinding/thinning, roughness and step heights on Si, SiC and glass

Probe card inspection

Planarity, tip geometry and wear, probe marks, MEMS probe cards

Advanced packaging

Bumps and pillars, coplanarity, RDL, hybrid bonding, TSV/TGV, fan-out

Package & micro-optics

Wire bonds, bow/warp, microlenses and micro-optical structures

Systems

Lab Series · lab & R&D Near-Fab Series · near production, cleanroom-ready Fab Series · fully automated up to 300 mm

Technologies

Confocal microscopy White light interferometry Confocal + WLI in one system Chromatic confocal sensors ARS – Angular Resolved Scatterometry

Beyond semiconductor

Proven across industries – and still available

For three decades, NanoFocus systems have measured technical surfaces wherever micrometers and nanometers decide function, wear and quality. While our development focus is now on semiconductor and electronics, our established solutions for other industries remain fully available – including application support, service and spare parts.

Automotive & engines

Non-contact 3D measurement of cylinder bores, honing structures, sealing and functional surfaces – directly on the component.

µsurf cylinder

Medical technology

Optical roughness and structure analysis of joint implants, coatings and medical device surfaces.

µsurf implant

Blades & razor cartridges

Grinding angle, edge geometry and material thickness of individual blades – and inspection of blades in the assembled state inside razor cartridges.

µsurf blademaster µscan cartridgemaster

Precision engineering & tools

Cutting edges, micro-structures and functional surfaces of precision parts and tools – fast, non-contact and close to production.

Photonics & optics

Micro-optics, microlenses, diffractive structures and optical functional surfaces from lab to wafer scale.

Materials & research

Roughness, wear, coatings and microstructures in materials science and university research.

Looking for a solution outside semiconductor? Contact us at sales@nanofocus.de – we will advise you or connect you with the right partner. Standard 3D microscopes of the MarSurf family are also available through Mahr sales in your region.

About us

A specialist within a strong group

Since 1994 NanoFocus has developed, manufactured and sold optical 3D metrology systems – with development, application lab and production under one roof in Oberhausen, Germany. As a Mahr Group company, we focus this expertise on the semiconductor and electronics industry, backed by the group's worldwide sales and service network.

HQ
Oberhausen, Germany
Group
Mahr Group
Focus
Semiconductor · Electronics
Member
SEMI VDMA Silicon Saxony

Contact

We're here for you as usual

We reply within one business day.

Sales & inquiries

Quotes, feasibility studies, demos

sales@nanofocus.de

Service & support

Maintenance, calibration, software

service@nanofocus.de

Cyber Resilience Act

Vulnerabilities, security updates, conformity

cyberresilience@nanofocus.de

General

Press, purchasing, careers

info@nanofocus.de
AddressNanoFocus GmbH · Max-Planck-Ring 48 · 46049 Oberhausen · Germany Phone+49 208 62000-0 Worldwidemahr.com